Ke Xu, Qiang An and Peng Li* Pages 1 - 9 ( 9 )
The atomic force microscope (AFM) is widely used in many fields such as biology, materials, and physics due to its advantages of simple sample preparation, high-resolution topography measurement and wide range of applications. However, the low scanning speed of traditional AFM limits its dynamics process monitoring and other further application. Therefore, the improvement of AFM scanning speed has become more and more important. In this review, the working principle of AFM is first proposed. Then, we introduce the improvements of cantilever, drive mechanism, and control method of the high-speed atomic force microscope (HS-AFM). Finally, we provide the next developments of HS-AFM.
High-speed AFM, cantilever, scanner, feedback control algorithm, AFM, topography.
School of Information & Control Engineering, Shenyang Jianzhu University, Shenyang, School of Information & Control Engineering, Shenyang Jianzhu University, Shenyang, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124