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Fabrication of Bidirectional Electrothermal Microactuator by Two-Photon Polymerization

Author(s):

Ishak Ertugrul* and Tayyab Waqar  

Abstract:


Background: Alternative micro/nanofabrication methods are being investigated actively due to the cost, time consumption and complexities involving in conventional MEMS fabrication practices.

Objective: The majority of fabrication techniques are based on several strictly followed steps, thus demanding more extended periods and attention.

Methods: One of the fabrication techniques that emerged to address those issues mentioned above is called Two-Photon Polymerization (2PP). In this work, 2PP based 3D printing technique has been utilized to perform the fabrication of an electrothermal microactuator using support structure, and its operability has been illustrated via experiments.

Results: The characterization results show a movement of 2.82 µm when a voltage of 5 to 7V is applied to the microactuator. Any voltage above 7V causes the breakage in the actuator arms. Since it is a bidirectional actuator, therefore, the total movement span is 5.64 µm.

Conclusion: Finite Element Analysis (FEA) and Analytical analysis of the designed electrothermal structure were performed before the fabrication process.

Keywords:

MEMS, 2PP, Semiconductor Polymer, Actuator, Fabrication, Characterization.

Affiliation:

Technical Science Vocational School, Mus Alparslan University, Mus, Mechatronic Engineering Faculty, Marmara University, Istanbul



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